金屬蝕刻過程的控制
文章出處：本站 責(zé)任編輯：Editor 人氣：2037 發(fā)表時(shí)間：2019-2-27 10:52:41 【
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<b style="text-indent: 21.1pt;"><span style="font-family: 宋體; font-size: 10.5pt;"><a href="http://www.wbplr.cn/">金屬蝕刻</a></span></b><span style="text-indent: 21.1pt; font-family: 宋體; font-size: 10.5pt;"><font face="宋體">質(zhì)量的保證主要來自于對(duì)蝕刻過程的控制</font>,</span><b style="text-indent: 21.1pt;"><span style="font-family: 宋體; font-size: 10.5pt;"><a href="http://www.wbplr.cn/">金屬蝕刻</a></span></b><span style="text-indent: 21.1pt; font-family: 宋體; font-size: 10.5pt;">過程的控制分為化學(xué)參數(shù)</span><span style="font-family: 宋體; font-size: 10.5pt;">控制和物理參數(shù)控制。</span></p>
<p class="MsoNormal"><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;">?</span></p>
<p class="MsoNormal"><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;">1.<font face="宋體">化學(xué)參數(shù)控制</font></span><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;"><o:p></o:p></span></p>
<p class="MsoNormal" style="text-indent:21.0000pt;mso-char-indent-count:2.0000;"><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;"><font face="宋體">化學(xué)參數(shù)控制對(duì)于維持蝕刻液均勻的蝕刻速度是非常關(guān)鍵的</font>,<font face="宋體">化學(xué)參數(shù)控制主要</font></span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">包括溶液濃度的控制和溶液中各組分之間的比例控制。對(duì)這兩方面的控制</font><span style="font-family: 宋體; font-size: 10.5pt;">,</span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">前者的濃度控制</font><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;"><font face="宋體">容易</font>,<font face="宋體">可以通過分析的方法就能確定溶液中成分的消耗情況。而對(duì)于后者控制難度要大一些</font></span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">主要是因?yàn)槲g刻液中的添加物質(zhì)含量較低</font><span style="font-family: 宋體; font-size: 10.5pt;">,</span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">并且可能是一些較難分析的材料</font><font face="Calibri" style="font-size: 10.5pt;">,</font><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">或和蝕刻液</font><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;">中的主料分離較為困難。</span><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;"><o:p></o:p></span></p>
<p class="MsoNormal" style="text-indent:21.0000pt;mso-char-indent-count:2.0000;"><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;"><font face="宋體">化學(xué)參數(shù)控制的依據(jù)來源于對(duì)溶液成分的分析而不是經(jīng)驗(yàn)的估計(jì)</font>,<font face="宋體">當(dāng)然對(duì)于一些小廠并</font></span><span style="font-family: 宋體; font-size: 10.5pt;">不排除操作者可以通過觀察蝕刻過程進(jìn)行的激烈程度、被蝕刻金屬表面的狀態(tài)以及溶液顏色</span><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;"><font face="宋體">的變化再根據(jù)經(jīng)驗(yàn)來進(jìn)行調(diào)節(jié)</font>,<font face="宋體">并滿足在一定程度上的可控性。這種方式對(duì)于成分單一的蝕</font></span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">刻液具有一定的實(shí)用性</font><span style="font-family: 宋體; font-size: 10.5pt;">,</span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">但對(duì)于成分組成復(fù)雜</font><font face="Calibri" style="font-size: 10.5pt;">,</font><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">同時(shí)對(duì)金屬蝕刻深度均一性要求較高的工件</font><font face="Calibri" style="font-size: 10.5pt;">,</font><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;"><font face="宋體">采用這種方法有很大的局限性</font>,<font face="宋體">難于保證批量生產(chǎn)的需要。從保證產(chǎn)品質(zhì)量穩(wěn)定的角度出發(fā)</font><font face="Calibri">,</font></span><span style="font-family: 宋體; font-size: 10.5pt;">要求蝕刻廠能把分析結(jié)果作為調(diào)整蝕刻液的依據(jù)。</span></p>
<p class="MsoNormal" style="text-indent:21.0000pt;mso-char-indent-count:2.0000;"><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;"><font face="宋體">化學(xué)蝕刻溶液的分析周期主要受以下幾方面因素的影響</font>:<font face="宋體">①溶液體積</font><font face="Calibri">;</font><font face="宋體">②溶液的初始濃</font></span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">度</font><span style="font-family: 宋體; font-size: 10.5pt;">;</span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">③單位體積的負(fù)荷量</font><font face="Calibri" style="font-size: 10.5pt;">;</font><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">④蝕刻量</font><font face="Calibri" style="font-size: 10.5pt;">(</font><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">一般以日為單位</font><font face="Calibri" style="font-size: 10.5pt;">)</font><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">。對(duì)這幾方面的影響因素很容易理解</font><font face="Calibri" style="font-size: 10.5pt;">,</font><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;"><font face="宋體">溶液體積小、溶液初始濃度低、單位體積的負(fù)荷量較大的情況下</font>,<font face="宋體">蝕刻液成分的變化速度就快其分析周期就較短</font><font face="Calibri">,</font><font face="宋體">反之則長。通常而言</font><font face="Calibri">,</font><font face="宋體">如果蝕刻溶液體積不大</font><font face="Calibri">,</font><font face="宋體">批量生產(chǎn)的情況下應(yīng)保持</font></span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">每個(gè)班次分析一次</font><span style="font-family: 宋體; font-size: 10.5pt;">(</span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">這里的班次是以</font><font face="Calibri" style="font-size: 10.5pt;">8h</font><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">為一個(gè)生產(chǎn)周期計(jì)算</font><font face="Calibri" style="font-size: 10.5pt;">)</font><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">。</font></p>
<p class="MsoNormal" style="text-indent: 21pt; text-align: center;"><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;"><a href="http://www.wbplr.cn/"><img src="/include/upload/fck/_DSC6351.jpg" width="600" height="467" alt="" /></a></font></p>
<p class="MsoNormal"><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;">?</span></p>
<p class="MsoNormal"><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;">2.<font face="宋體">物理參數(shù)控制</font></span><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;"><o:p></o:p></span></p>
<p class="MsoNormal" style="text-indent:21.0000pt;mso-char-indent-count:2.0000;"><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;">物理參數(shù)的控制分為通用參數(shù)控制及蝕刻方式所決定的其他參數(shù)控制。通用參數(shù)控制主</span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">要是對(duì)在蝕刻過程中時(shí)間、溫度進(jìn)行控制</font><span style="font-family: 宋體; font-size: 10.5pt;">:</span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">由蝕刻方式所決定的其他參數(shù)控制包括浸泡蝕刻的溶液攪拌程度的控制以及噴射蝕刻的噴射壓力的控制。在化學(xué)參數(shù)可控范圍內(nèi)</font><font face="Calibri" style="font-size: 10.5pt;">,</font><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">物理參數(shù)的控制對(duì)于維持其蝕刻速度的恒定及蝕刻均勻性是非常重要的。物理參數(shù)的控制相對(duì)于化學(xué)參數(shù)的控制來說要容易得多</font><font face="Calibri" style="font-size: 10.5pt;">,</font><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">也直觀得多。同時(shí)</font><font face="Calibri" style="font-size: 10.5pt;">,</font><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">一些設(shè)備對(duì)溫度、時(shí)間及噴射壓力都有自控裝置</font><font face="Calibri" style="font-size: 10.5pt;">,</font><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">只需要預(yù)先將這些參數(shù)輸人即可。</font></p>
<p class="MsoNormal" style="text-indent: 21pt; text-align: center;"><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;">?<img src="/include/upload/fck/碼盤(5).jpg" width="600" height="467" alt="" /></span></p>
<p class="MsoNormal" style="text-indent:21.0000pt;mso-char-indent-count:2.0000;"><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;">任何</span><b><span style="font-family: 宋體; font-size: 10.5pt;"><a href="http://www.wbplr.cn/">金屬蝕刻</a></span></b><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;"><font face="宋體">都一定有兩個(gè)需要控制的指標(biāo)</font>,<font face="宋體">即深度和表面平滑度。雖然物理因素和化</font></span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">學(xué)因素的變化都會(huì)對(duì)蝕刻深度及表面平滑度產(chǎn)生影響</font><span style="font-family: 宋體; font-size: 10.5pt;">,</span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">但在確定的蝕刻液成分及濃度的情況</font><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;"><font face="宋體">下</font>,<font face="宋體">對(duì)深度的影響主要是物理因素</font><font face="Calibri">,</font><font face="宋體">在溫度、壓力恒定的前提下</font><font face="Calibri">,</font><font face="宋體">確保蝕刻深度指標(biāo)的因素</font></span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">是蝕刻時(shí)間</font><span style="font-family: 宋體; font-size: 10.5pt;">,</span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">在實(shí)際生產(chǎn)中也是通過時(shí)間來對(duì)蝕刻深度進(jìn)行控制。而對(duì)于表面平滑度</font><font face="Calibri" style="font-size: 10.5pt;">,</font><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">雖</font><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;"><font face="宋體">然溫度的變化會(huì)有一定的影響</font>,<font face="宋體">但主要還是受蝕刻液的化學(xué)組分的影響</font><font face="Calibri">,</font><font face="宋體">在化學(xué)組中添加物質(zhì)</font></span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">對(duì)表面平滑度的影響比蝕刻主劑的影響更大</font><span style="font-family: 宋體; font-size: 10.5pt;">,</span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">同時(shí)調(diào)整也更困難</font><font face="Calibri" style="font-size: 10.5pt;">,</font><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">但可以通過實(shí)驗(yàn)確定一個(gè)單</font><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;">位面積消耗量的經(jīng)驗(yàn)值來控制。</span><span style="mso-spacerun:′yes′;font-family:Calibri;mso-fareast-font-family:宋體;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;"><o:p></o:p></span></p>
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